Conference paper Open Access
Micro-transfer-printing for heterogeneous integration
Corbett, B.; Li, Z; Buehler, K.; Naumann, F.; Krieger, U.; Wicht, S.; Bower, C.A.
Micro-transfer-printing is a key enabling technology for the heterogeneous integration of different materials and devices. The technique is particularly applicable to photonics where a typical system requires diverse arrays of components.
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Indexed in
- Publication date:
- February 11, 2020
- DOI:
-
- Grants:
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European Commission:
- MICROPRINCE - Pilot line for micro-transfer-printing of functional components on wafer level (737465)
- Meeting:
- 2019 6th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)
- Communities:
- License (for files):
- Creative Commons Attribution 4.0 International