Scanning Precession Electron Tomography (SPET) for Structural Analysis of Thin Films along Their Thickness
- 1. CRISMAT, CNRS, Normandie Univ, ENSICAEN, UNICAEN 14000 Caen (France)
Description
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| General information:
|_______________________________________________________________________________
| Article | Scanning Precession Electron Tomography (SPET) for Structural Analysis
| | of Thin Films along Their Thickness
|
| Authors | Sara Passuti, Julien Varignon, Adrian David, Philippe Boullay
|
| Journal | Symmetry 2023, 15, 1459
|
| DOI | 10.3390/sym15071459
|
| Funding | NanED (www.naned.eu)(ESR project 12)
|
| Project Label | PVO_STO
|
| Sample Label | PVO_STO
|
| Dataset description | SPET (scanning precession electron tomography) acquisition on
| | the PVO thin film deposited on STO substrate, analyzed in section
| | in the form of a TEM lamella. In the main folder the datasets
| | corresponding to each one of the analyzed areas of the
| | sample at different thicknesses (i.e. distances from the
| | interface with the substrate) is found.
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| Experimental
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| Data Type | Electron diffraction data - 3D ED
|
| Data collection method | SPET (Scanning Precession Electron Tomography)
|
| Number of experimental frames | 57
|
| tilt range | -50.7° to +43.5°
|
| Exposure time per frame | 500 ms
|
| Software used for the data collection | ASI Accos
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| Instrumental: |
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| Instrument | Transmission electron microscope
| | Jeol F200
| Radiation source | cold FEG
|
| Accelerating voltage | 200 kV
|
| Wavelength | 0.0251 Å
|
| Probe Type | Microdiffraction
|
| Beam Diameter | 10 nm
|
| Beam Convergence | Parallel beam, convergence <0.1mrad
|
| Detector | Hybrid pixel detector ASI Cheetah M3
|
| Number of pixels in the image | 512 x 512
|
| Pixel size | 55 µm x 55 µm
|
| Effective camera length | 200 mm
|
| Calibration constant | 0.00708 Å-1/pixel
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| Sample description:
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| Name | PVO thin film on STO substrate
| | at thickness = 0.52 nm
| | film deposited by SPS and cut by FIB
|
| Chemical composition | PrVO3, SrTiO3
|
| Number of crystals contributing | 1
| to the data set
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| Authorship and bibliography
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| Author of the data | Sara Passuti (ESR 12)
|
| Related data
|
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| Files and data formats
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| Image format | tiff_16bit
|
| Folders/files | layer_#1_0.52_nm
| | layer_#2_3.28_nm
| | layer_#3_4.20_nm
| | layer_#4_5.12_nm
| | layer_#5_7.88_nm
| | layer_#6_9.72_nm
| | layer_#7_12.48_nm
| | layer_#8_17.08_nm
| | layer_#9_29.08_nm
| | substrate
| | each of the folders contains the respective "tiff" folder containing
| | the diffraction patterns in tiff format and the files for the analysis,
| | as well as the metadata file with the specific information of the
| | dataset
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Notes:
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Files
PVO_STO.zip
Files
(167.2 MB)
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Additional details
Related works
- Is published in
- Journal article: 10.3390/sym15071459 (DOI)