Published February 11, 2020
| Version v1
Conference paper
Open
Micro-transfer-printing for heterogeneous integration
- 1. Tyndall National Institute
- 2. Fraunhofer Institute for Microstructure of Materials and Systems
- 3. X-FAB MEMS Foundry GmbH
- 4. X-Celeprint Inc
Description
Micro-transfer-printing is a key enabling technology for the heterogeneous integration of different materials and devices. The technique is particularly applicable to photonics where a typical system requires diverse arrays of components.
Files
LTB-3D Micro-transfer-printing for heterogeneous integration.pdf
Files
(109.2 kB)
| Name | Size | Download all |
|---|---|---|
|
md5:c5174f3b4b5cb2637cb1c8a8430418c0
|
109.2 kB | Preview Download |