Published February 11, 2020 | Version v1
Conference paper Open

Micro-transfer-printing for heterogeneous integration

  • 1. Tyndall National Institute
  • 2. Fraunhofer Institute for Microstructure of Materials and Systems
  • 3. X-FAB MEMS Foundry GmbH
  • 4. X-Celeprint Inc


Micro-transfer-printing is a key enabling technology for the heterogeneous integration of different materials and devices. The technique is particularly applicable to photonics where a typical system requires diverse arrays of components.


LTB-3D Micro-transfer-printing for heterogeneous integration.pdf

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MICROPRINCE – Pilot line for micro-transfer-printing of functional components on wafer level 737465
European Commission