Combined Atomic, Microwave and Electron Microscope: A tool for Hybrid Characterization of Nanomaterials

A near-field scanning millimeter-wave microscope (NSMM) integrated in a scanning electron microscope (SMM) is proposed in this discussion. The instrument can provide simultaneously atomic, GHz and electron images of the sample under investigation. Main features of the solution proposed are (i) environment control in the vicinity of the probe for quantitative measurement, (ii) frequency extension up to 110 GHz for imaging resolution improvement, (iii) real-time visualisation of the probe-to-sample interaction for accurate electrical modelling. The design, realization and the principle of operation of the proposed instrument will be developed. Experimental results related to atomic force microscopy and scanning microwave microscope reference samples will be presented to situate the performance of the instrument proposed. Finally, characterization of emerging nanomaterials foreseen within H2020-NMBP-07-2017 MMAMA will be discussed.