M3TERA - Micromachined terahertz systems a new heterogeneous integration platform enabling the commercialization of the THz frequency spectrum
M3TERA aims to provide a wide-spread use of low cost- THz technology in our society, enabled by a micromachined heterogeneous integration platform, which provides a unique way to highly-integrated, volume–manufacturable, cost- and energy-efficient, reconfigurable submillimeter-wave and THz systems. The proposed THz integration platform is envisioned to initiate an important transition in industrial microwave-systems manufacturing and is expected to finally enable the large-scale commercialization of the heavily sought-after frequency space between 100 GHz and 1 THz.