ALD saturation profile - open data

ALD saturation profile - open data

(1st version of description - to be modified)

New uploads to be included need to

  • Accurately identify the test structure type and dimensions
  • ALD process details (temperature, reactants, flows, reactor information)
  • Thickness measurement method information
  • Thickness profile data, preferably original raw data included  
  • Preferably: date of ALD process and date of thickness measurement 
  • Creator of the dataset and/or the file to be uploaded