(1st version of description - to be modified)

New uploads to be included need to

• Accurately identify the test structure type and dimensions
• ALD process details (temperature, reactants, flows, reactor information)
• Thickness measurement method information
• Thickness profile data, preferably original raw data included  
• Preferably: date of ALD process and date of thickness measurement 
• Creator of the dataset and/or the file to be uploaded