Publishable Summary for 20IND06 PROMETH2O - Metrology for trace water in ultra-pure process gases

Trace water is the single largest matrix contaminant in ultra-high purity (UHP) process gases (e.g. Ar, N₂ and H₂) and its presence affects the process yield in UHP gas applications. Even though the manufacturing of UHP gases serves many key technology areas, such as high-value semiconductor manufacturing, the trace water measurements are still lacking metrological traceability in the relevant ranges and matrix gases. The project will fill the knowledge gap regarding the metrological traceability - by developing traceable and
improved measurement methods at challenging amount fractions between 5 ppm and 5 ppb for use in the production of pure process gases - and will demonstrate its applicability in the gas industry.