Published December 15, 2022 | Version v1
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Micromechanical high-Q trampoline resonators from strained crystalline InGaP for integrated free-space optomechanics

Authors/Creators

  • 1. Department of Microtechnology and Nanoscience (MC2), Chalmers University of Technology, SE-412 96 Gothenburg, Sweden
  • 2. Institute of Physics, Otto von Guericke Universit¨at Magdeburg, 39106 Magdeburg, Germany

Description

We share experimental data for Figs. 2,4,5,6,11,12,13 of arxiv manuscript arXiv:2211.12469 [physics.app-ph] entitled "Micromechanical high-Q trampoline resonators from strained crystalline InGaP for integrated free-space optomechanics".

Notes

We acknowledge funding by the QuantERA project C'MON-QSENS!, the Knut and Alice Wallenberg Foundation through a Wallenberg Academy Fellowship (W.W.), by the Wallenberg Center for Quantum Technology (WACQT, A.C.), by Chalmers Excellence Initiative Nano, and by the Swedish Research Council (Grant no. 2019-04946). Sample fabrication was performed in the Myfab Nanofabrication Laboratory at Chalmers. Simulations were performed on resources provided by the Swedish National Infrastructure for Computing (SNIC) at Tetralith, Link¨oping University, partially funded by the Swedish Research Council (Grant 2018-05973).

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Additional details

Related works

Is referenced by
Preprint: arXiv:2211.12469 (arXiv)

References

  • arXiv:2211.12469