Published December 13, 2022 | Version v1
Conference paper Open

COATING SOLUTIONS FOR WAFERLEVEL OPTICS

  • 1. Evatec AG, Trübbach

Description

In a trend to reduce manufacturing cost, optical components are increasingly manufactured on wafer level. In our presentation we will show how this concept applies to smart glasses and edge emitting lasers. Both appli-cations require optical thin film coating steps to enable their function. The presentation will address the special requirements such as excellent edge coverage and high thickness accuracy. In order to meet these challenges, we developed coating systems which combine the strength of semiconductor machines in terms of automated handling with the accuracy of optical coating machines.

Files

Session_1_4_Evatec_2022__Schwyn_Silvia_final.pdf

Files (292.2 kB)

Name Size Download all
md5:abca41903f8dd6968355c7767d82fab2
292.2 kB Preview Download

Additional details

Related works

Is cited by
10.5281/zenodo.7431725 (DOI)