COATING SOLUTIONS FOR WAFERLEVEL OPTICS
Description
In a trend to reduce manufacturing cost, optical components are increasingly manufactured on wafer level. In our presentation we will show how this concept applies to smart glasses and edge emitting lasers. Both appli-cations require optical thin film coating steps to enable their function. The presentation will address the special requirements such as excellent edge coverage and high thickness accuracy. In order to meet these challenges, we developed coating systems which combine the strength of semiconductor machines in terms of automated handling with the accuracy of optical coating machines.
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Session_1_4_Evatec_2022__Schwyn_Silvia_final.pdf
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Additional details
Related works
- Is cited by
- 10.5281/zenodo.7431725 (DOI)