Published March 14, 2022
| Version v1
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Gaussian files SU-8 chemical removal study
Description
Gaussian 16 input and output files (logs) for calculations of the Gibbs free energy of various model compouds of interest to study the reaction of dimethylamine with SU-8 and its effect on ether cleavage in concentrated sulfuric acid.
Files
Gaussian_files_SU_8.zip
Files
(14.0 MB)
Name | Size | Download all |
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md5:025590c22f586c1ee92a4e38a2bc345a
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14.0 MB | Preview Download |
Additional details
Related works
- Is cited by
- Preprint: https://chemrxiv.org/engage/chemrxiv/article-details/6229163597f21030e903ee40 (URL)