Published November 17, 2021 | Version 4.2
Software Open

QUASES-Inelastic electron mean free path calculator (by TPP2M formula)

  • 1. Dept of Physics, Chemistry, and Pharmacy, University of Southern Denmark, DK-5230 Odense M, Denmark

Description

The QUASES-IMFP-TPP2M-CF software is a user friendly calculator for the inelastic electron mean free path for electrons in materials. It is based on the Tanuma, Powell and Penn algorithm [1] and has an option to account for relativistic effects  [2].

The software includes a database with parameter values for all elements and a wide range of compounds, oxides, and polymers. There are also facilities to easily expand the database with new materials.

The software also provides means to calculate the elastic scattering correction in XPS. The change in XPS peak intensity from a layer of atoms at depth z, caused by elastic electron scattering, is conveniently described by a correction factor CF, which can be estimated with the software within two approximations [3,4,5]. For a practical application watch videos 6, 8 and 9 at: https://doi.org/10.5281/zenodo.5499741.

A manual is integrated in the software. 

[1] S. Tanuma, C. J. Powell, D. R. Penn:Surf. Interf. Anal. 21(1994)165
[2] H. Shinotsuka, S. Tanuma, C. J. Powell, D. R. Penn: Surf. Interf. Anal. 47(2015)871
[3]  A.Jablonski, S.Tougaard, 'Practical Correction Formula for Elastic Electron Scattering Effects in Attenuation of Auger and Photoelectrons',Surf. Interf. Anal. 26(1998)17
[4] Jablonski, S.Tougaard, Surf. Interf. Anal. 26(1998)374
[5] S. Tougaard, Practical guide to the use of backgrounds in quantitative XPS, J. Vac. Sci. Technol. A 39, 011201 (2021); https://doi.org/10.1116/6.0000661

Copyright (c) 2000-2022 All rights reserved
The software code is written by Sven Tougaard.
Copyright (c) 2000-2021 Quases-Tougaard Inc.
Free to use for non-commercial applications.
Sven Tougaard, Dept of Physics, Chemistry, and Pharmacy, University of Southern Denmark, DK-5230 Odense M, Denmark

Files

QUASES-IMFP calculator.zip

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