Published November 15, 2021
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Self-excited Contact Resonance Operation of a Tactile Piezoresistive Cantilever Microprobe with Diamond Tip (Data)
- 1. TU Braunschweig, Institute of Semiconductor Technology (IHT)
- 2. Physikalisch-Technische Bundesanstalt (PTB)
Description
Raw data and figures used for the article "Self-excited Contact Resonance Operation of a Tactile Piezoresistive Cantilever Microprobe with Diamond Tip", published in the proceedings of Sensor and Measurement Science International 2021; 2021-05-03 - 2021-05-06; digital.
Notes
This project has received funding from the EMPIR program co-financed by the Participating States and from the European Union's Horizon 2020 research and innovation program under no. 17IND05 MicroProbes.
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Data.zip
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Related works
- Is supplement to
- Conference paper: 10.5162/SMSI2021/A5.4 (DOI)