Published October 28, 2021
| Version 2021-10-28
Dataset
Open
EUV optical constants data set
Creators
- 1. Physikalisch-Technische Bundesanstalt, Abbestraße 2-12, 10587 Berlin, Germany
- 2. imec, Kapeldreef 75, 3001 Leuven, Belgium
- 3. optiX fab GmbH, Hans-Knöll-Str. 6, 07745 Jena, Germany
- 4. MESA+, Institute for Nanotechnology, University of Twente, The Netherlands
- 5. Department of Solid State Sciences, Krijgslaan 281/S1, 9000 Gent, Belgium
Description
Dataset of optical constants in the extreme ultraviolet (EUV) spectral range, including 13.5nm, obtained from reflectivity measurements.
Files
Mo_nk.txt
Files
(33.2 kB)
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