Published February 19, 2021 | Version 1
Dataset Open

Refractive index data for 150 nm Ag measured with ellipsometry

  • 1. Swiss Federal Institute Of Technology, EPFL

Contributors

  • 1. Swiss Federal Institute Of Technology, EPFL

Description

This is the refractive index data for 150 nm Ag thin film measured using the Sopra GES 5E spectroscopic ellipsometer. The data is extracted using the bulk calculation model of the WinEliII  software. The incidence angle was 75 degrees, the analyzer was kept at 45 degrees. The film was deposited using e-beam evaporation technique in Lab 600H. The substrate used was silicon wafer of 525 microns thick. 2 nm of titanium was deposited initially as an adhesion layer and 1 nm of AgOx was deposited as the seed layer. It was followed by deposition of Ag (50 nm each for 3 times). The deposition rate of all the metals was 4 angstorm/sec with a base pressure of 1.5*10^(-6) mbar.

Files

Ag_Debdatta_Ray.txt

Files (83.9 kB)

Name Size Download all
md5:63a8f1a5ab63337e517735c66a7c7b40
83.9 kB Preview Download

Additional details

Funding

Swiss National Science Foundation
Phase engineering on plasmonic metasurfaces 200021_162453
European Commission
NANOFACTORY - Building tomorrow’s nanofactory 695206