Published October 22, 2020 | Version v1
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The anisotropy in the optical constants of quartz crystals for soft X-rays

  • 1. Physikalisch-Technische Bundesanstalt (PTB), Berlin, Germany
  • 2. National Institute of Standards and Technology (NIST), Gaithersburg, Maryland, USA
  • 3. ASML Netherlands B.V. (ASML), Netherlands


The refractive index of a y-cut SiO2 crystal surface is reconstructed from polarization dependent soft X-ray reflectometry measurements in the energy range from 45 eV to 620 eV. In the datasets the 1-delta and beta values for the (100) and (001) direction of the SiO2 crystal for the different energies are provided.



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TAPES3 – Technology Advances for Pilotline of Enhanced Semiconductors for 3nm 783247
European Commission