Published February 2, 2012
| Version v1
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Calibration of Spectroscopic Reflectometer for Thin Film Characterization
Creators
- 1. Department of Physics, Bangabandhu Sheikh Mujibur Rahman Maritime University, Dhaka 1216, Bangladesh
- 2. Institute of Electronics, Atomic Energy Research Establishment (AERE), Gonoakbari, Dhaka, Bangladesh
Description
Spectroscopic reflectometer is generally used for measuring the thickness of thin films. Optical techniques are used for this purpose.
Optical techniques measure the thickness of thin transparent and semi-transparent layers by analyzing white light interference. Here we have done installation and calibration of a spectroscopic reflectometer at VLSI Lab, IE, AERE. Results regarding calibration are also discussed.
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Calibration of Spectroscopic Reflectometer for Thin Film Characterization.pdf
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