Published March 10, 2020
| Version v3
Figure
Open
Prediction of plasma etching yields by machine learning to reveal the complexity of underlying physics
Description
figures and a table
figIonvsTargetNumberOfGroups.png and figIonvsTargetRelativeImportance.png and tableI.pdf are added on Apr 30, 2020.
Files
figCycle.png
Files
(1.2 MB)
| Name | Size | Download all |
|---|---|---|
|
md5:dde792a0c31231392ffc976b3b3d0338
|
43.3 kB | Preview Download |
|
md5:b3cbfd1093f1c7be472a725773ef2784
|
9.5 kB | Preview Download |
|
md5:6427243a1ed4dc5b1f7fd1a4ac72be12
|
20.0 kB | Preview Download |
|
md5:03f5c76bd3420fb27df7ce8434ddbffc
|
108.4 kB | Preview Download |
|
md5:1a88062c4019b7200150092ff406f246
|
90.8 kB | Preview Download |
|
md5:e98c0e1c1c27750d56e1950e276aa8d6
|
108.2 kB | Preview Download |
|
md5:0c0a8c78d9ab5b679c2e014a9586c2f7
|
109.2 kB | Preview Download |
|
md5:74017c60242806809f071f6f4a214a54
|
111.0 kB | Preview Download |
|
md5:19e8b20e0df557daa40fb893aa059ee9
|
101.4 kB | Preview Download |
|
md5:69ca745afd5a133b6d0eec7958d0706e
|
99.8 kB | Preview Download |
|
md5:825862ad5f0a7161f28288171da1626b
|
92.2 kB | Preview Download |
|
md5:e4a3172422965970dde24c9aa3a4d95f
|
11.6 kB | Preview Download |
|
md5:8f2ec08d9d180df5e40c1cf9d762f828
|
11.0 kB | Preview Download |
|
md5:a86e242f79cb7ef0072f1fea67e43fa6
|
107.8 kB | Preview Download |
|
md5:a51f8495325fa431622a356e70b43380
|
106.5 kB | Preview Download |
|
md5:85c4f4f33df258463b4b5c479053201b
|
88.5 kB | Preview Download |
|
md5:1b59256d2242d21eb43a2a2f5838648b
|
7.8 kB | Preview Download |
