Published October 23, 2019
| Version v1
Poster
Open
A near-field scanning microwave microscope in a scanning electron microscope: design and challenges.
Authors/Creators
- 1. IEMN - Univ. of Lille
- 2. IEMN - CNRS
- 3. University of Oldenburg
Description
We present a Scanning Electron and Microwave Microscopy (SEMM) that is a combination of complementary microscopy techniques. The SEMM namely combines Atomic Force Microscopy (AFM), Scanning Electron Microscopy and Vector Network Analysis (VNA). Combination of multiple modes allows cross correlation of imaging techniques that may be useful for investigating materials at the nanoscale.
Files
Abstract ISPM 2019.pdf
Files
(2.1 MB)
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