Published October 23, 2019 | Version v1

A near-field scanning microwave microscope in a scanning electron microscope: design and challenges.

  • 1. IEMN - Univ. of Lille
  • 2. IEMN - CNRS
  • 3. University of Oldenburg

Description

We present a Scanning Electron and Microwave Microscopy (SEMM) that is a combination of complementary microscopy techniques. The SEMM namely combines Atomic Force Microscopy (AFM), Scanning Electron Microscopy and Vector Network Analysis (VNA). Combination of multiple modes allows cross correlation of imaging techniques that may be useful for investigating materials at the nanoscale.

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Abstract ISPM 2019.pdf

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Additional details

Funding

European Commission
MMAMA - Microwave Microscopy for Advanced and Efficient Materials Analysis and Production 761036