Dataset for publication: "Atomic Layer Deposited MnOx Nanoscale-thin Films with TiO2 Interfacial Layer in AC for High-Energy-Density Supercapacitors"

The dataset contains the raw data of manganese oxide (MnOx) nanothin-films coated on activated carbon (AC) supercapacitor electrodes using atomic layer deposition technique (ALD). The fabricated electrodes were evaluated with material characterization techniques such as ellipsometry, Brunauer-Emmett-Teller, X-ray photoelectron spectroscopy, scanning electron microscopy, and transmission electron microscopy coupled with energy-dispersive X-ray spectroscopy, and at two- and three-electrode system electrochemical measurements such as cyclic voltammetry, galvanostatic charge-discharge, and electrochemical impedance spectroscopy. The package also includes the figures, tables, and other data analysis used for the publication.