Published December 17, 2025 | Version v3
Dataset Open

ALD on particles: Literature collection and dataset

Description

A dataset collected from scientific publications on Atomic Layer Deposition (ALD) on particle substrates, limited to English-language literature with DOI handle and containing experimental data on the topic. Only particles in powder form are considered, excluding immobilized particles on a substrate, pelletized particles, particle-based electrodes etc. Besides bibliographic data, the dataset quotes basic qualitative values from the original works. The initial dataset contains 802 publications from the years 1988 through 2023. 

Update 07-02-2025: Revised list now containing 797 articles.

Update 09-07-2025: Preview of corresponding review article available here https://arxiv.org/abs/2506.17725

Update 17-12-2025: 
- Dataset with more fields (support materials, processes, etc.) uploaded.
- Review article linked to this dataset https://doi.org/10.1021/acs.chemmater.5c01919

 

 

Files

Files (711.1 kB)

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Additional details

Related works

Is supplement to
arXiv:2506.17725 (arXiv)
Journal article: 10.1021/acs.chemmater.5c01919 (DOI)

Dates

Available
2025-12-17
Dataset version with more fields

Software

Repository URL
https://github.com/P4Science/ALDpm
Development Status
Concept