Monitoring texture formation during diamond growth by specular and diffuse reflectance interferometry

This paper is aimed at describing a sequential synthesis coupled to an extensive analysis in order to study the morphological evolution of a {100}{111}⟨100⟩ textured diamond film. We compare several morphological parameters obtained by in situ optical methods and ex situ characterizations. The texture formation is found to be correlated with a significant increase in the growth rate of the film. In addition, morphology reconstruction of polycrystalline film is presented from which the R₁₀₀ covering ratio of {100} faces is extracted. As a result, a phenomenological model has been developed for real-time growth parameters extraction of the film based on in situ optical measurements.