Published January 1, 1970 | Version v1
Conference paper Open

Metrology development at NIST for characterizing wear-out and reliability of thin gate dielectrics

Creators

Description

n/a

Files

article.pdf

Files (368.7 kB)

Name Size Download all
md5:9a45e43f080a8781af3c47d0c71f31cf
368.7 kB Preview Download