Published June 1, 1992
| Version v1
Journal article
Open
A new test structure for the electrical measurement of the width of short features with arbitrarily wide voltage taps
Authors/Creators
Description
n/a
Files
article.pdf
Files
(220.9 kB)
| Name | Size | Download all |
|---|---|---|
|
md5:f9554361ff824cf50366630352201139
|
220.9 kB | Preview Download |