Published March 5, 2024
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50 Gbps vertical separate absorption charge multiplication Ge/Si avalanche waveguide photodetectors integrated in a 300-mm Si photonics platform
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Abstract: We report 35 GHz Ge-on-Si avalanche photodetectors integrated on 300-mm SOI wafers, enabling high-quality eye diagrams at 50 Gbps NRZ, and low thermal drift of the breakdown voltage (<9 mV/°C). Early stress tests show only a mild drift of dark current and breakdown voltage.
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