Published January 16, 2024 | Version v1
Journal article Open

Crystallinity and composition of Sc1-x(-y)Six(Py) silicides in annealed TiN / Sc / Si:P stacks for advanced contact applications

Creators

  • 1. ROR icon KU Leuven
  • 2. ROR icon IMEC
  • 3. Imec

Files

Pollefliet+et+al_2024_Jpn._J._Appl._Phys._10.35848_1347-4065_ad1f0d.pdf

Files (1.8 MB)

Additional details

Funding

European Commission
ID2PPAC – Integration of processes and moDules for the 2 nm node meeting Power Performance Area and Cost requirements 101007254