Published January 1, 2004
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In situ control of the catalyst efficiency in chemical vapor deposition of vertically aligned carbon nanotubes on predeposited metal catalyst films
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Premature termination of growth, presumably because of catalyst deactivation, is an undesirable
side effect of chemical vapor deposition of vertically aligned carbon nanotubes on predeposited
metal catalyst films. The addition of ferrocene, an effective precursor for in situ Fe formation, was
found to enhance carbon nanotube growth rates and extend growth to 3.25 mm thick carbon
nanotube films. Ferrocene was introduced into the gas stream by thermal evaporation concurrently
with acetylene using a specially constructed source. The key factor facilitating the growth of thick
carbon nanotube films was the independent and precise control of the ferrocene amount in the
feedstock. The carbon nanotube films were characterized by scanning and transmission electron
microscopy, and Raman spectroscopy. The temperature dependence of the carbon nanotube growth
with ferrocene exhibits a steep drop at high substrate temperatures and a loss of vertical alignment
at 900 °C. The negative temperature coefficient of the growth rate suggests that the reaction
mechanism of vertically aligned carbon nanotube growth is governed by a heterogeneous
intermediate step.
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