Published May 1, 2012
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High-speed atomic force microscopy with phase-detection
Description
In order to improve the scanning speed of tapping mode AFM, we have studied the phasedetection
mode AFM with a high frequency (1.5 MHz) cantilever. The phase shifts versus tipsample
distance with different types of samples including polymer, semiconductor, and
graphite were measured and the interaction forces were analyzed. It was found that the phase
shift in repulsive region is nearly linear as a function of distance, which can be used for
feedback control in general, except that some blunt tips cause reversed polarity of phase shift
due to excessive energy dissipation. High-speed image with scan rate of 100 Hz was obtained
which were controlled with phase shift as a feedback signal.
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