IMPURITY OF ATOMS OF MANGANESE DIFFUSION BY OUTSIDE ELECTRIC FIELD INTO SILICON

In this work, manganese atoms were diffused into a silicon sample using an external constant electric field, and the electrophysical parameters of the samples were studied using the Van der Paw method. In addition, the surface morphology and element composition of the samples were analyzed using a scanning electron microscope. From the results, it was found that Mn atoms were significantly diffused in the samples placed on the side of the negative pole of the constant external electric field compared to the samples placed on the side of the positive pole