Published September 6, 2022
| Version Version 1
Dataset
Open
5D-NP-FABTECH_ALD - Open Dataset for: "Shedding light on the initial growth of ZnO during plasma-enhanced atomic layer deposition on vapor-deposited polymer thin films"
Authors/Creators
- 1. Graz University of Technology
- 2. Brno University of Technology
- 3. Istituto Italiano di Tecnologia
Description
This is the open dataset for the paper: "Demelius, L. et al. Shedding light on the initial growth of ZnO during plasma-enhanced atomic layer deposition on vapor-deposited polymer thin films. Applied Surface Science 604, (2022)."
This includes the supplementary information and all the source material that was used for the paper preparation.
For each folder (sub-dataset), there exists a corresponding readme file describing the content and including material.
Files
5D-NP-FABTECH_ALD-AFM.readme.txt
Files
(311.7 MB)
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540.1 kB | Preview Download |
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md5:b0ea573d3cea044abc77bbace3d4aa7a
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3.2 MB | Download |