Published March 14, 2022 | Version v1
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Gaussian files SU-8 chemical removal study

  • 1. CSIC

Description

Gaussian 16 input and output files (logs) for calculations of the Gibbs free energy of various model compouds of interest to study the reaction of dimethylamine with SU-8 and its effect on ether cleavage in concentrated sulfuric acid. 

Files

Gaussian_files_SU_8.zip

Files (14.0 MB)

Name Size Download all
md5:025590c22f586c1ee92a4e38a2bc345a
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