Published November 23, 2021
| Version 1
Dataset
Open
Phase characteristic optimization of resonant MEMS environmental sensors (Data)
Creators
- 1. TU Braunschweig, Institute of Semiconductor Technology (IHT) and Indonesia Institute of Sciences (LIPI), Research Centre for Physics
- 2. TU Braunschweig, Institute of Semiconductor Technology (IHT)
Description
Origin projects and figures used for the article "Phase characteristic optimization of resonant MEMS environmental sensors", published in the proceedings of Sensoren und Messsysteme 2018, 19. ITG/GMA-Fachtagung; 26.06.2018 to 27.06.2018; Nürnberg, Germany.
Files
Data.zip
Files
(3.0 MB)
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Additional details
Related works
- Is supplement to
- Conference paper: 978-3-8007-4683-5 (ISBN)
- Conference paper: https://ieeexplore.ieee.org/abstract/document/8436151 (URL)