Published September 23, 2021
| Version v1
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Dataset for "A graph-theoretic approach for spatial filtering and its impact on mixed-type spatial pattern recognition in wafer bin maps"
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This is the dataset used in the paper, Ezzat, Liu, Hochbaum, and Ding, 2021, “A graph-theoretic approach for spatial filtering and its impact on mixed-type spatial pattern recognition in wafer bin maps,” IEEE Transactions on Semiconductor Manufacturing, Vol. 34, pp. 194-206.
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J76_Datasets.zip
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(8.6 kB)
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References
- Ezzat, Liu, Hochbaum, and Ding, 2021, "A graph-theoretic approach for spatial filtering and its impact on mixed-type spatial pattern recognition in wafer bin maps," IEEE Transactions on Semiconductor Manufacturing, Vol. 34, pp. 194-206.
- https://arxiv.org/abs/2006.13824