Published March 5, 2020 | Version v1
Dataset Open

Data for A FinFET with one atomic layer channel

Creators

  • 1. Institute of Metal Research, Chinese Academy of Science
  • 2. Institute of Chemical Biology and Nanomedicine, State Key Laboratory of Chemo/Biosensing and Chemometrics, College of Chemistry and Chemical Engineering, Hunan University, Changsha 410082, China
  • 3. Institute of Metal Research
  • 4. Anhui Key Laboratory of Condensed Matter Physics at Extreme Conditions, High Magnetic Field Laboratory and University of Science and Technology of China, Chinese Academy of Science (CAS), Hefei, Anhui Province, China.
  • 5. State Key Laboratory of Quantum Optics and Quantum Optics Devices, Institute of Opto-Electronics, Shanxi University, Taiyuan 030006, P. R. China
  • 6. Key Laboratory of Nanodevices and Applications, Suzhou Institute of Nanotech and Nanobionics, Chinese Academy of Science, Suzhou 215123, P. R. China.
  • 7. Universit$\acute{e}$ Grenoble Alpes, CEA, LETI, 38000 Grenoble, France.

Contributors

Contact person:

  • 1. Shanxi University, & Shenyang National Laboratory for Materials Science.

Description

This dataset contains raw optical/SEM images of the nano fabrication, and electrical transport test, etc, which are related to the manuscript of A FinFET with One Atomic Layer Channel.

Files

Data for A finFET with one atomic layer channel.zip

Files (395.6 MB)