Presentation Open Access

MICROPRINCE-Open access pilot line for Micro-Transfer-Printing of functional components on wafer level

Wicht, Sebastian; Krieger, Uwe; Guenther, Daniela; Heise, Niclas; Krojer, Matthias; Kittler, Gabriel; Naumann, Falk; Altmann, Frank; Gomez, David; Fecioru, Alin

Micro-transfer-printing (μTP) represents a versatile micro-assembly technology which has been developed in laboratory and (for photo-voltaic application) in an industrial environment over the last ten years. Within the European funded ECSEL project “MICROPRINCE” the worldwide first open access pilot line for μTP will be installed in the clean room facilities of the X-FAB MEMS Foundry GmbH. Moreover, the project possesses the objective to demonstrate the capabilities of this pilot line for heterogeneous integration of different application scenarios. Therefore, functional components for several target applications will be transferred and assembled on wafer level and the benefits of the μTP technology will be explained.

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