Transfer of Run-to-Run-Control to Production Control Level in Semiconductor Front-End

Supply chain disruptions with an unpredictable occurrence such as significant differences between forecasts and actual customer demands are challenging for semiconductor manufacturers. Normally, these events are responded to with a time-consuming mostly manual procedure. This work describes an approach for an automated framework to react faster and with less effort on these unpredictable events. Therefore, an approach based on run-to-run-control has been developed establishing a closed-loop control between supply chain and production control. As a result of this approach, safety stocks can be reduced due to a more accurate cycle time prediction and a reduced number of false alarms regarding supply chain disruptions.