Metrology standards for advanced semiconductor lithography referenced to atomic spacings and geometry

Creators

• Teague, E. C.
• Linholm, L. W.
• Cresswell, M. W.
• Penzes, W. B.
• Kramar, J. A.
• Scire, F. E.
• Villarrubia, J. S.
• Jun, J. S.