Published June 1, 2023
| Version v1
Poster
Open
Development of a Cobalt Atomic Layer Deposition Process using Co2(CO)6HC≡CC5H11 as Precursor
- 1. Fraunhofer Institute for Electronic Nano Systems ENAS
- 2. scia Systems GmbH
- 3. Fraunhofer Institute for Electronic Nano Systems ENAS, Center for Microtechnologies, University of Technology Chemnitz
Description
Poster presented at the EUROCVD / Baltic ALD conference 2023 in Leuven Belgium.
Notes
This work was funded by the EFRE fund of the European Commission and by funding of the Free State of Saxony of the Federal Republic of Germany (project ALMET, grant number 100302427).
Files
2023-06 EuroCVD BalticALD Franz Cobalt ALD.pdf
Files
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