Published May 23, 2023
| Version v1
Journal article
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Codes and Data for paper "Reinforcement Learning for Process Control with Application in Semiconductor Manufacturing"
Authors/Creators
- 1. Shanghai Jiao Tong University
- 2. The Hong Kong University of Science and Technology
Description
This is codes and data for the paper "Reinforcement Learning for Process Control with Application in Semiconductor Manufacturing"
Files
1_LinearCases_Section3_Comp_with_R2R_Const_Para.zip
Files
(449.8 MB)
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md5:08e5056b6e5867ec0bfad29363c1c71b
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61.8 MB | Preview Download |
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md5:a2e226ba13d89962af6c57453d0c3c58
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110.9 MB | Preview Download |
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md5:11326029d93f465bc1c8909de1de4b8a
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63.0 MB | Preview Download |
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md5:84b5f6743ce983460d8b62be9abf7847
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10.2 kB | Preview Download |
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md5:157ba3340c26c6aabbd00eb1bfc92d92
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75.2 MB | Preview Download |
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md5:24c625fc8629b8ccd4d8764390680288
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48.5 MB | Preview Download |
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md5:82847d53d375e222efd916e25b0605ec
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90.5 MB | Preview Download |
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md5:8459b17e7b8509585c6e2234f205093b
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6.3 kB | Preview Download |
Additional details
Related works
- Is supplement to
- Journal article: arXiv:2110.11572 (arXiv)