Low-Frequency MEMS Accelerometer

The exponential growth in demand for compact and efficient accelerometers is driven by their diverse applications across industries such as automotive, aerospace, consumer electronics, and healthcare. This article presents two designs of small-size accelerometers: the ultra-compact "SRAmicro" and the slightly larger, higher-accuracy "SRAHi−P re." Both accelerometers are designed to operate in frequency ranges of (0 ÷ 200) Hz and temperatures −50◦C − +180◦C. The SRAmicro model is ideal for applications with limited space, while the SRAHi−Pre model offers higher accuracy for mission-critical applications. The article discusses the structures, materials, and methods used to create and optimize these accelerometers. Experimental results indicate that the SRAHi−Pre model, when combined with a thermal compensation circuit, significantly reduces the temperature sensitivity parameter (γ) and improves the overall performance of the device. These compact accelerometers have the potential to meet the increasing demands for diverse applications in various industries.