Published December 6, 2021
| Version v1
Dataset
Open
FIB cleaned and reshaped Electrostatic electron vortex beam generators - dataset2
Authors/Creators
- 1. CNR-NANO - S3 centre Modena
- 2. CNR-IMM Bologna
Description
Here is a second set of SEM images of Electrostatic electron vortex beam generators fabricated at the CNR-IMM in Bologna and FIB cleaned and reshaped at the CNR-NANO in Modena. The difference between this batch of devices and the first one is in the thickness of the electrode (the z-dimension), this batch has a electrode thickness of 30um, while the first batch is 10um thick.
Files
20211206_chip1_SEM_001.TIF
Files
(12.7 MB)
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Additional details
Related works
- Is continued by
- Dataset: 10.5281/zenodo.5873331 (DOI)