Improved route to a diphenoxide-based precursor for CVD of parylene AF-4

In this work, we present an easy synthesis of a alternative precursor for CVD of parylene AF-4 to the widely used standard, Octafluoro[2.2]paracyclophane. The standard precursor suffers from uncertainties in its supply chain and its synthesis is of low yield. A comparison between different reaction parameters and solvents are being discussed by means of thermal, laboratory scale and microwave assisted reactions and qNMR studies.