Published September 22, 2020 | Version 1
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Sensitive capacitive pressure sensors based on graphene membrane arrays

  • 1. Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ, Delft, The Netherlands
  • 2. Applied Nanolayers B.V., Feldmannweg 17, 2628 CT, Delft, The Netherlands
  • 3. Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD, Delft, The Netherlands

Description

Datafiles for Figs. 2-6 of the article "Sensitive capacitive pressure sensors based on graphene membrane arrays" published in Microsystems & Nanoengineering, DOI: 10.1038/s41378-020-00212-3, URL: https://www.nature.com/articles/s41378-020-00212-3

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