QUANTUM TUNNELING SENSORS

Realisation of the first working sensor based on quantum tunneling between arrays of nanowires[1,2,3] is presented. The sensing element consists of 12,000 nanowires, each 90 nm wide and 5 mm long (~1:55,000 aspect ratio), on an area
of 5 x 4.3 mm. The sensing element was fabricated using phase shift mask lithography and dry etch processes followed by CMP. Characterisation was carried with SEM and AFM.
The first devices we built were configured as linear encoders of position and motion. The devices performance was demonstrated with electrical testing using an independent nanopositioner. Strong signals in μA range were obtained on scans from several hundred nm to several mm range.
The principle of operation can be utilized for trunsduction of dynamic quantities such as vibration, acceleration, pressure, flow and others when timer mechanism is inbuilt or harmonic analysis of signal is implemented. Dynamic quantum tunneling nanoTrek® devices depending on final configuration may be designed and built to function as:
• wireless networks smart sensors for motion detection and perimeter security;
• sonobuoys for Navy;
• vibration sensors in perimeter security sensing, ship building, air-foil testing, building stability;
• accelerometers and gyroscopes for inertial guidance systems, missile guidance, aviation, shipping and automotive;
• image stabilization systems in optical devices in infra-red, night vision, vehicle mounted, cameras and video;
• ultra sensitive microphones for intelligence, medicine or mobile phones;
• displacement and tremor sensors in nuclear test monitoring, mining, mineral exploration, geology, tectonics; or
• seismometers for early earthquake warning systems or tsunami detection.