Published December 1, 2018 | Version v1
Dataset Open

A set of typical relevant exposure scenarios for nanoparticles in semiconductor industry (dataset)

  • 1. IMEC
  • 2. Intel
  • 3. NXP

Description

This is an Excel database  part of Deliverable 1.3 "A set of typical relevant exposure scenarios for NP’s in semiconductor industry"

https://www.zenodo.org/record/2538388

 

Files

Files (330.5 kB)

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Additional details

Funding

European Commission
NanoStreeM - NANOmaterials: STRategies for Safety Assessments in advanced Integrated Circuits Manufacturing 688194

References

  • 10.5281/zenodo.2538388