Dataset for the Comparison of Broadband Single-Sweep and Conventional Banded System On-Wafer S-Parameter Measurements up to 220 GHz

Summary:
This dataset contains S2P files measured using a vector network analyzer which support the conference paper below. The folder contains two subfolders. The folder “Main Results” contains the data which was used in Figs. 2–5. The folder "Repeatability Assessment" contains the data which was used for Fig. 6.

The filenames are: "devices type" + "device identifier number" + "_CORR" (where "__CORR" indicates its calibrated data [using multiline TRL]).

Additionally, the files in the "Repeatability Assessment" folder also contain "P1" or "P2" which indicates if the port 1 side (P1) or the port 2 side (P2) was lifted and relanded for that repeat measurement, and "RA" which just stands for "Repeatability Assessment".

The dataset supplements the following conference paper:

L. Ausden, N. Ridler, A. Rumiantsev, J. Martens and X. Shang, "Comparison of Broadband Single-Sweep and Conventional Banded System On-Wafer S-Parameter Measurements up to 220 GHz," 2025 105th ARFTG Microwave Measurement Conference (ARFTG), San Fransisco, CA, USA, 2025, pp. 1-4, doi: 10.1109/ARFTG65332.2025.11168146 (freely downloadable PDF at https://zenodo.org/records/17425562).

DOI:    
10.5281/zenodo.22658069

Title:
Dataset for the Comparison of Broadband Single-Sweep and Conventional Banded System On-Wafer S-Parameter Measurements up to 220 GHz

Creators:
Liam Ausden, National Physical Laboratory, UK (ORCID 0009-0006-7545-1617)
Nick Ridler, National Physical Laboratory, UK (ORCID 0000-0002-1462-2914)
Andrej Rumiantsev, MPI Corporation, Taiwan (0000-0001-8945-9800)
Jon Martens, Anritsu, USA (ORCID 0000-0002-4245-8859)
Xiaobang Shang, National Physical Laboratory, UK (ORCID 0000-0002-0298-4184)

License:
CC-BY 4.0 International

Keywords:
Measurement comparison, millimeter-wave measurement, on-wafer measurement, S-parameters, vector network analyzer

Classification:
INSPEC B7310N Microwave measurement techniques
INSPEC B2810 Dielectric materials and properties
INSPEC B7130 Measurement standards and calibration
INSPEC B7110 Measurement theory

Project title:
On-wafer microwave metrology for future industrial applications (OnMicro)

Funder:
European Commission

Funder ID:
10.13039/100019599
Grant number: Partnership 23IND10 OnMicro

Link to project homepage:
https://www.ptb.de/epm2023/onmicro/home

Software: 
The files can be viewed in any plain text editor. They can be also imported with the METAS VNA Tools software, see https://www.metas.admin.ch/en/vna-tools