Published June 7, 2026
| Version 0.2.0
Software
Open
wafer-proc-sim: Data-quality-aware heteroscedastic GP surrogate for 4H-SiC blade dicing
Description
Open-source framework for 4H-SiC blade dicing process optimization combining physics-based simulation, heteroscedastic Gaussian process surrogates, Ensemble Kalman Filter state estimation, and Bayesian optimization. Core paper path is reproducible via scripts/reproduce_paper.sh with CI-regression-tested LOO metrics.
Files
keisuke58/wafer-proc-sim-v0.3.0.zip
Files
(26.7 MB)
| Name | Size | Download all |
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md5:b555cc714b93beb785c6709e8d80dd08
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Additional details
Related works
- Is supplement to
- https://github.com/keisuke58/wafer-proc-sim (URL)
Software
- Repository URL
- https://github.com/keisuke58/wafer-proc-sim