SGS-Based P+ −P Microbridge Architecture for Harsh-Environment Accelerometers
Authors/Creators
- 1. Scientific Research Technological Institute of Instrument Engineering_(Ukraine)
Description
Piezoresistive accelerometers utilizing a distributed-parameter microbridge (µMC) circuit in a p+-p silicon structure offer a reliable alternative to piezoelectric sensors for extreme operating conditions. This work updates fundamental research from the late 1980s on monolithic integrated piezoresistive transducers by integrating “silicon
glass-silicon” (SGS) technology and modern multiphysics modeling (COMSOL). This approach eliminates the use of insulating p-n junctions, involves heavy doping of the
piezoresistive channels, and utilizes charge carrier redistribution in the channels and the elastic element to ensure stable operation at temperatures up to 350◦C and accelerations up to 10,000 g. Simulations confirm excellent performance over a wide range (from ±30 g to ±6000 g) with minimal temperature drift, as well as static and dynamic capabilities and compatibility with commercial data acquisition systems,
Notes
This work is a peer-reviewed article titled "SGS-Based P+ −P Microbridge Architecture for Harsh-Environment Accelerometers" by Michael Tikhomirov.
This record is an identical version of the research registered on the Open Science Framework (OSF).
OSF Registration DOI: 10.1149/osf.io/3m2yj_v1
The OSF registration contains the full study registration, simulation files, raw data tables, and supplementary materials.
License: Creative Commons Attribution 4.0 International (CC BY 4.0)
Version: 1.0 (submitted version)
Keywords: piezoresistive accelerometer, SGS, silicon-glass-silicon, high-temperature sensor, MEMS, distributed microbridge, COMSOL
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SGS_Based_PpluP_Microbridge_Architecture_HEAccelerometers.pdf
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References
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