VNA Tools: Material Parameters Extraction from On-Wafer CPW S-Parameter Measurements

We present a software extension for determining material parameters from on-wafer line measurements. This work covers deembedding algorithms for four different models of coplanar waveguides. Their inverse implementation enables material characterization including uncertainty propagation. An example of line measurements from 1-65 GHz on an alumina calibration substrate is provided to demonstrate the application and its ease of use. This extension facilitates material characterization and systematic studies of uncertainty contributions in the realms of on-wafer measurements. It is freely available, allowing industry and research institutions to benefit from an accessible and efficient tool for on-wafer material parameter extraction.