Published March 31, 2026
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In-situ analysis of metal atom, metal ion and argon ion fluxes in industrial magnetron sputtering with Al, Cr and AlCr targets
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Peter Klein a , Jaroslav Hnilica a , Mojmír Jílek b, Mayur Khan c , Anna Macková c , Petr Vašina a ,∗ a Department of Plasma Physics and Technology, Masaryk University, Kotlářská 2, CZ-61137, Brno, Czech Republic b SHM, s.r.o., Průmyslová 3020/3, Šumperk 78701, Czech Republic
a Department of Plasma Physics and Technology, Masaryk University, Kotlářská 2, CZ-61137, Brno, Czech Republic
b SHM, s.r.o., Průmyslová 3020/3, Šumperk 78701, Czech Republic
c Nuclear Physics Institute of the Czech Academy of Sciences, Rez, 250 68, Czech Republic
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