Published 2026
| Version v2
Dataset
Open
MD animations (Supplement materials)
Description
Supplement materials for the submission Atomic layer etching of sputter-deposited AlN
thin films in radiofrequency Cl2-Ar plasmas
Files
Files
(456.0 MB)
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md5:689180609254b35d24ad466b9240ecc2
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20.9 MB | Download |
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md5:e27a452f7b50122bde9810a1b47dc065
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13.9 MB | Download |
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md5:2deb2dd1185f23bc50bb155e25ffbe60
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22.7 MB | Download |
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md5:caf90f7cd19396698250638ba01b8c50
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13.8 MB | Download |
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md5:cbc93cb1f7705a2738cd8163ef1f7939
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12.6 MB | Download |
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md5:35505c12d7ed88c22352331b61bbcf78
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15.7 MB | Download |
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md5:8d95b0320699187b4545fb903cd83f62
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13.0 MB | Download |
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md5:e6308390c0962feb83a7ee70bf185e3d
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25.9 MB | Download |
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md5:869f02a66887eb3f10ee83a8b38c9def
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112.2 MB | Download |
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md5:3f38193ec6e226913a6ec846b7730cd8
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39.3 MB | Download |
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md5:c79d096759b247879cdd9b5085cc9fc4
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95.1 MB | Download |
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md5:0a3e85d5d54a3bb9fc24772bffe4e5bd
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70.9 MB | Download |